JPS6384938U - - Google Patents
Info
- Publication number
- JPS6384938U JPS6384938U JP17970286U JP17970286U JPS6384938U JP S6384938 U JPS6384938 U JP S6384938U JP 17970286 U JP17970286 U JP 17970286U JP 17970286 U JP17970286 U JP 17970286U JP S6384938 U JPS6384938 U JP S6384938U
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- group element
- compound semiconductor
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Local Oxidation Of Silicon (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17970286U JPS6384938U (en]) | 1986-11-25 | 1986-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17970286U JPS6384938U (en]) | 1986-11-25 | 1986-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384938U true JPS6384938U (en]) | 1988-06-03 |
Family
ID=31122993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17970286U Pending JPS6384938U (en]) | 1986-11-25 | 1986-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384938U (en]) |
-
1986
- 1986-11-25 JP JP17970286U patent/JPS6384938U/ja active Pending